-凯发平台

hea|  |02086nam0 2200373   45  
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011|  |▼a0734-211x
040|  |▼ajvtbd9
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100|  |▼a19920916a19839999m  y0engy0120    ba
101|0 |▼aeng
102|  |▼ausa
110|  |▼aaga    0uu0
200|10|▼ajournal of vacuum science & -
   |  |technology b▼gamerican vacuum society
207| 0|▼as.2, v.1 (1983)-
210|  |▼anew york, n.y.▼camerican ins-
   |  |titute of physics▼d1983-
300|  |▼acoverage by abstracting and -
   |  |indexing publication: computer-
   |  | & control abstracts = issn 0036-8113
300|  |▼acoverage by abstracting and -
   |  |indexing publication: electric-
   |  |al & electronics abstracts = i-
   |  |ssn 0036-8105
300|  |▼acoverage by abstracting and -
   |  |indexing publication: physics -
   |  |abstracts. science abstracts. -
   |  |series a = issn 0036-8091
300|  |▼acoverage by abstracting and -
   |  |indexing publication: metals a-
   |  |bstracts = issn 0026-0924
300|  |▼acoverage by abstracting and -
   |  |indexing publication: world al-
   |  |uminum abstracts = issn 0002-6697
300|  |▼acoverage by abstracting and -
   |  |indexing publication: spin
300|  |▼acoverage by abstracting and -
   |  |indexing publication: chemical-
   |  | abstracts = issn 0009-2258
300|  |▼acoverage by abstracting and -
   |  |indexing publication: coal abs-
   |  |tracts = issn 0309-4979
300|  |▼acoverage by abstracting and -
   |  |indexing publication: current -
   |  |physics index = issn 0098-9819
431|  |▼12001▼a0022-5355
530|0 |▼ajournal of vacuum science & -
   |  |technology. b, microelectronic-
   |  |s processing and phenomena
531|  |▼aj. vac. sci. technol., b, mi-
   |  |croelectronics process. phenom.
541|1 |▼a（美）真空科学与技术杂志．ｂ辑，微电子处理与现象-
676|  |▼a621.5/5/05
690|  |▼ao552
712|0 |▼aamerican vacuum society
905|  |▼a801▼b000500014940▼b000500014-
   |  |031▼b000500163309▼b00050004079-
   |  |6▼b000500015749▼b000410018372▼-
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