-凯发平台

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110|  |▼aaga    0uu0
200|10|▼ajournal of vacuum science & -
   |  |technology▼ha
207| 0|▼as.2, v.1 (1983)-
210|  |▼anew york, n.y.▼camerican ins-
   |  |titute of physics▼d1983-
431|  |▼12001▼a0022-5355
530|0 |▼ajournal of vacuum science & -
   |  |technology. a. vacuum, surface-
   |  |s, and films
531|  |▼aj. vac. sci. technol., a, va-
   |  |c. surf. films
541|1 |▼a（美）真空科学与技术杂志．ａ辑，真空、表面与膜-
676|  |▼a621.5/5/05
690|  |▼ao552
712|0 |▼aamerican vacuum society
712|0 |▼aamerican institute of physics
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